Electron density fluctuations in a dusty Ar/SiH4rf discharge

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Electron density fluctuations in a dusty Ar/SiH4 rf discharge

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ژورنال

عنوان ژورنال: Journal of Applied Physics

سال: 1995

ISSN: 0021-8979,1089-7550

DOI: 10.1063/1.359774